Batteries in a portable world by Isidor Buchmann

By Isidor Buchmann

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58 The bevel angle should be measured with a well-calibrated profilometer. In the absence of a top oxide, the measurement should be started at least 10–20 points before the bevel edge. The actual starting point can then be determined from a micrograph (dark field illumination, magnification 500×). The error on the starting point should not be larger than a few points (maximum 3). Typically, the raw resistance profile shows a transition at the starting point position. The probe imprints must be visible to be able to count them and to determine the starting point.

The small SRP angles are determined by measuring a small slit of light that is reflected from the beveled and the unbeveled surfaces so that two images are detected. 61 Limitations in SRP profiling for very shallow junctions arise due to the large sampling volume induced by the large contact and probe spacing necessitating correction 34 RESISTIVITY factors which can be as large as 2000. Moreover, additional correction factors have been identified to correct for carrier spilling, surface damage, microcontact distribution, and three-dimensional current flow.

Ferrite core Sound receiver Sound generator Eddy currents (b) (c) Fig. 25 (a) Schematic eddy current experimental arrangement, (b) practical implementation after Johnson81 , and (c) schematic showing the eddy current coils and the thickness sound generator. If VT is held constant through a feedback circuit, the current is proportional to the sample conductivity-thickness product, or it is inversely proportional to the sample sheet resistance. A more recent implementation is shown in Fig. 81 Eddy current and other contactless techniques are discussed further in Chapter 7 in reference to lifetime measurements.

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