Handbook of Silicon Based MEMS Materials and Technologies, by Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami

By Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Krockel, Veikko Lindroos

The instruction manual of Silicon established MEMS fabrics and applied sciences, moment Edition,

is a accomplished consultant to MEMS fabrics, applied sciences, and production that examines the state of the art with a selected emphasis on silicon because the most vital beginning fabric utilized in MEMS.

The booklet explains the basics, homes (mechanical, electrostatic, optical, etc.), fabrics choice, education, production, processing, approach integration, size, and fabrics characterization thoughts, sensors, and multi-scale modeling tools of MEMS constructions, silicon crystals, and wafers, additionally overlaying micromachining applied sciences in MEMS and encapsulation of MEMS elements.

Furthermore, it offers important packaging applied sciences and technique wisdom for silicon direct bonding, anodic bonding, glass frit bonding, and comparable ideas, exhibits tips to shield units from the surroundings, and offers strategies to diminish package deal measurement for a dramatic aid in bills.

  • Provides important packaging applied sciences and technique wisdom for silicon direct bonding, anodic bonding, glass frit bonding, and similar techniques
  • Shows find out how to defend units from the surroundings and reduce package deal measurement for a dramatic relief in packaging costs
  • Discusses houses, coaching, and development of silicon crystals and wafers
  • Explains the numerous houses (mechanical, electrostatic, optical, etc.), production, processing, measuring (including centred beam techniques), and multiscale modeling tools of MEMS structures
  • Geared in the direction of useful purposes instead of theory

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Additional resources for Handbook of Silicon Based MEMS Materials and Technologies, Second Edition (Micro and Nano Technologies)

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Pdf.. [3] P. Woditsch, W. Koch, Solar grade silicon feedstock supply for PV industry, Sol. Energ. Mate. Sol. Cells 72 (2002) 11À26. A. Istratov, T. D. Pickett, M. R. Weber, Control of metal impurities in “dirty” multicrystalline silicon for solar cells, Mat. Sci. Eng. B 134 (2006) 282À286. [5] K. Petersen, Silicon as a mechanical material, P. IEEE 70 (1982) 420À457. [6] R. ), Properties of Crystalline Silicon, Inspec, London, 1999. [7] Landolt-Bo¨rnstein Group III Condensed Matter, Volume 41A2a and Volume 41A1b,2002, Springer.

Com/.. [8] J. Martin, U. Kuetgens, J. Stu¨mpel, P. Becker, The silicon lattice parameter—an invariant quantity of nature? Metrologia 35 (1998) 811À817. D. R. , Prentice Hall, Upper Saddle River, NJ, 2001. [10] A Commercial Software. htm.. [11] R. V. Voronkov, F. Quast, On the properties of the intrinsic point defects in silicon: a perspective from crystal growth and wafer processing, Phys. Status Solidi B 222 (2000) 219À244. [12] R. V. Voronkov, The engineering of intrinsic point defects in silicon wafers and crystals, Mater.

The large piezoresistive effect in silicon is due to the fact that, instead of a stress-dependent change in geometry, the effect is first and foremost due to the stress-dependent resistivity of the material. The strain applied to the lattice causes the anisotropic band structure to deform, giving rise to anisotropic change in the mobility of the current carriers. 3 Stress in Anisotropic Materials The elastic behavior of isotropic materials can be defined with just two elastic constants, commonly used parameters being the Young’s modulus Y and Poisson’s ratio ν, but modified constants known as bulk modulus K and shear modulus G are also sometimes used.

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